ЈLj(bo)ؔ(ci)(jng)W(wng)Ӎ xomn.cn 1119“о”ϵ“”(lin)ڶЇMEMS܂a(chn)I(y)l(f)չ߷Փh_ĻʽڰɽƵ_
ίӛL\l(f)˟oB˰аl(f)չ¼g(sh)a(chn)I(y)ă(yu)Խڅг(w)L|֕h
MEMSa(chn)I(y)@
ЇI(y)214оA|늼о214ʼ1979꣬ɰa(chn)I(y)@Kаl(f)ĽMռes320a(chn)es5.5fƽYa(chn)11.48|Ԫ3300_()ҪӼg(sh)оСϢϵy(tng)ƺԇa(chn)LJӌI(y)Ǹоc(din)܊ͽy(tng)IO(sh)λ
ԁȺ@ҼƼɹ4(xing)ʡίƼɹ41 (xing)صȪ1(xing)F(tun)˾Ƽɹ43(xing),112(xing)
Ƽ“һӋ(j)¼g(sh)I(y)”“ʡ¼g(sh)I(y)”“ʡl(f)ُ(qing)I(y)”ȷQ̖Ї߶оƬ(lin)˕TλƼ(chung)(sh)ͻ2017걻“ȫλ”Q̖
оԺa(chn)I(y)(xing)ĿDZF(tun)cʡش(xing)Ŀ֮һĿ(bio)ǽɇ(ni)һشӰ܊ںMEMS (ASIC)EMCCDa(chn)ӰʡϢa(chn)I(y)Ŀٰl(f)չ(jng)^pͬŬa(chn)I(y)20168Ͷ\(yn)IMEMSa(chn)Ҏ(gu)ģO(sh)ˇg(sh)ˮƽڇ(ni)̎M(jn)ˮƽ
˴MEMS܂a(chn)I(y)l(f)չ߷Փּڰl(f)]RҼ߿Ƽо(yu)I(lng)ЇMEMS܂ͼ·a(chn)I(y)l(f)չȫصĸ߿оԺƼW(xu)g(sh)̽ӑM(jn)߿R۲
ЈLj(bo)ؔ(ci)(jng)W(wng)ӛ |