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ЇMEMS܂a(chn)I(y)l(f)չ(hu)ڰek

2024-05-15 15:50:46 Դؔ(ci)(jng)W(wng)   ݋|   

ЈLj(bo)ؔ(ci)(jng)W(wng)(xomn.cn)аӍ( ꐰ ӛ |)515磬Ї()MEMS܂a(chn)I(y)l(f)չ(hu)„l(f)(hu)e

ӛߏİl(f)(hu)˽⵽M(jn)һ(qing)ЇйИI(y)(ni)Ӱӿa(chn)I(y)ҪؼƂйȿٰl(f)չcʡƼdЇI(y)F(tun)Ʒl(f)չ(hu)̣524—25ڰ“(lin)ekЇ()MEMS܂a(chn)I(y)l(f)չ(hu)Ո(qng)?jin)ʿI(y)600˅

ЇMEMS܂a(chn)I(y)l(f)չ(hu)ИI(y)(ni)OӰI(lng)Įa(chn)I(y)ʢ(hu)2017ڰɹek˴δ(hu)ͻ߶I(lng)Ո(qng)Yfë7λԺʿӸ߷Փl(f)ּvͬr(sh)@δa(chn)I(y)ek͙C(j)˺XC(j)ӿܸ֪g(sh)(chung)°l(f)չՓAW(xu)W(xu)|ϴW(xu)пԺϺ΢ϵy(tng)ȇ(ni)һУԺ˅Ӵ(hu)}l(f)ԡͻf(xi)ͬl(f)չ(hu)УԺI(y)漰܂O(sh)Ӌ(j)byԇ͑(yng)õĮa(chn)I(y)θ(g)h(hun)(ji)o8ӢMEMSA쾀չ죬γa(chn)I(y)wϵͼۑB(ti)ͻλa(chn)I(y)@ʡ܇λa(chn)I(y)l(f)չekԴ܇ܾW(wng)“(lin)܇“܇оf(xi)ͬ”(chung)ca(chn)I(y)l(f)չՓՈ(qng)ʡ(ni)ܾW(wng)“(lin)܇܇Sһ(j)(yng)̰l(f)܇dȺl(f)չڅݺЈϢI(y)_l(f)ЈĂṩ֧

δ(hu)_O(sh)(g)Փքe@MEMSc΢ϵy(tng)I(lng)չʾa(chn)ƷO(sh)Ӌ(j)g(sh)ǰYӍИI(y)l(f)չǰ;@ΙC(j)˺XC(j)ӿڃɂ(g)I(lng)ܸ֪̽g(sh)ͺоƬԓI(lng)оɹδl(f)չڅ;@ԴcܾW(wng)“(lin)܇I(lng)̽ӑ܇ÂĿгɹԼ܇о֮gąf(xi)ͬl(f)չģʽÿ(g)ՓքeՈ(qng)10λҵČҌW(xu)ߺI(y)}l(f)ͨ^ǻ۵Ľײͬ\(chung)B(ti)ĽO(sh)ӿa(chn)I(y)f(xi)ͬM(jn)

ֵһǣ(hu)_Ļʽl(f)ʡƼd“(lin)ʡl(f)ίʡؔ(ci)d8Tӡl(f)ġ֧ЇйȰl(f)չߡԓ߹14lͻ“”ںϡa(chn)I(y)ʡ“(lin)(dng)漰ּ֧ӴͶ(chung)°l(f)չ˲Yl(f)չ傀(g)棬ּƄ(dng)(xing)ĿI(y)˲ŵҪYԴ֧ΰЇйȴ؅^(q)|(zh)l(f)չLO܂Юa(chn)I(y)Ⱥ¸ߵ

˹ӲO(sh)ʩ“(jng)Ԫ”Ҳ“(lin)W(wng)Ҫ“Ԫ”֮һͰl(f)չ|(zh)a(chn)ҪA(ch)Їаl(f)֮һί۽MEMSg(sh)ĵ܂Юa(chn)I(y)ӿҪؼƽ_(ti)O(sh)Їйʹ֮ɹSȫʮ܂a(chn)I(y)@^(q)

(dng)ǰȫЮa(chn)I(y)h(hun)ˇ΢әC(j)еϵy(tng)(MEMS)ط“(lin)Ϲ̌(sh)(yn)Ӝyԇg(sh)Ƽc(din)(sh)(yn)ʡ΢C(j)ϵy(tng)(MEMS)g(sh)a(chn)I(y)(chung)оԺ22ʡ(j)аl(f)ƽ_(ti)@ʡ܂ƼɹD(zhun)ԇM˿Ҏ(gu)ģ70|Ԫ܂Юa(chn)I(y)l(f)չ𣬂й넓(chung)ˆ@^(q)ӿ콨O(sh)(chung)@6ӢwMEMSAƽ_(ti)Լ8Ӣ΢ϵy(tng)Aаl(f)ƽ_(ti)аl(f)˾ЇHM(jn)ˮƽ4׹ˇg(sh)wϵϵy(tng)QMEMSI(lng)g(sh)̰壬ȺȡøƼɹ800(xing)“”“϶”“m”“”20(xing)Һc(din)̵“֮”ṩ(qing)ɞ(ni)и߶MEMSg(sh)ca(chn)Ʒߵءa(chn)I(y)ۼӿγ˱΢оԺо(dng)“(lin)ϣſƼмҹph(hun)ӵһИI(y)I(lng)܊I(y)γ܂вO(sh)Ӌ(j)byԇ͑(yng)õa(chn)I(y)wϵɞȫʡΨһȫ锵(sh)ͬr(sh)м·MEMSAa(chn)ijȫ܂Юa(chn)I(y)P(gun)I(y)_(d)200ңи¼g(sh)I(y)50ʡ(j)όI(y)17ңwa(chn)I(y)θ(g)h(hun)(ji)a(chn)I(y)Ч(yng)@F(xin)(jng)(j)Ҏ(gu)ك|Ԫ

؄eǵMEMS(hu)ԁʡίʡP(gun)֧ίĴƄ(dng)н(jng)_^(q)ץʡcЇI(y)F(tun)йȵđ(zhn)ԙC(j)M(jn)Їй넓(chung)…^(q)O(sh)|(zh)ЧһͶY3.5|ԪĂйȹԼg(sh)ƽ_(ti)(һ)\(yn)о(dng)“(lin)ƳɞȫʡMEMSI(lng)׼I(y)ϣſƼ(bo)ϽƄ(chung)o(do)й“һ@c(din)”ѼI(y)100γаl(f)O(sh)Ӌ(j)byԇ(yng)Þһwȫa(chn)I(y)朲2023ꌍ(sh)F(xin)Ҏ(gu)I(y)a(chn)ֵ51|Ԫ

ԓЌԼ(x)‡(yn)֔(jn)󾫵L(fng)c(din)ߘ(bio)(zhn)|(zh)ô(hu)(xing)I乤ѵЇ()MEMS܂a(chn)I(y)l(f)չ(hu)køɫӰгЧɿоwNȫa(chn)ֵǧ|Įa(chn)I(y)Ⱥγɇ(ni)һ֪Ї()йע(dng)

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